• Semiconductor Optoelectronics
  • Vol. 43, Issue 2, 261 (2022)
LIU Zhi1,2 and CHENG Buwen1,2,*
Author Affiliations
  • 1[in Chinese]
  • 2[in Chinese]
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    DOI: 10.16818/j.issn1001-5868.2022041001 Cite this Article
    LIU Zhi, CHENG Buwen. Research Progresses of Si-based Ge PIN Photodetectors[J]. Semiconductor Optoelectronics, 2022, 43(2): 261 Copy Citation Text show less

    Abstract

    Since the breakthrough of epitaxy technology of Si-based Ge film, Si-based Ge optoelectronic devices have developed rapidly, among which Si-based Ge photodetectors are the most prominent. Because Ge can absorb the light in the near-infrared communication band and is fully compatible with the Si CMOS process, Si-based Ge detectors are almost the only choice for Si-based optical detection. This paper mainly introduces the research progresses of two common Si-based Ge photodetectors (normal incidence and waveguide coupling), including typical device structures, and the main methodes to improve the performance of responsivity and bandwidth.