• Optics and Precision Engineering
  • Vol. 28, Issue 2, 390 (2020)
YAN Peng and LI Jin-yin
Author Affiliations
  • [in Chinese]
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    DOI: 10.3788/ope.20202802.0390 Cite this Article
    YAN Peng, LI Jin-yin. Design of piezo-actuated long-stroke fast tool servo mechanism[J]. Optics and Precision Engineering, 2020, 28(2): 390 Copy Citation Text show less

    Abstract

    Piezo-actuated Fast Tool Servo(FTS) technology is apromising method for processing complex surfaces such as optical free-form surfaces. To break through the stroke limitation of the piezo-actuated FTS mechanisms, a piezo-actuated long-stroke FTS mechanism was designed with a two-stage lever amplifying mechanism in the present paper; this effectively improved the long-stroke output performances of FTS mechanisms and eliminated parasitic displacement. The dynamic model of the mechanism was discussed based on the pseudo-rigid body model and Lagrangian principle. The mechanism parameters were optimized by synthesizing the stroke as well as the natural frequency performance; Finite Element Analysis(FEA) and experimental verification were also carried out. The errors of equivalent stiffness and the natural frequency of the mechanism between the theoretical model and FEA are 6.4% and 1.6%, respectively, validating the theoretical model. The experimental results show that the designed FTS mechanism can achieve a 100-μm output stroke and 730 Hz natural frequency, which agrees well with the analysis and simulations. The closed-loop tracking experiments of the designed system are also given, demonstrating the design's adequatetracking performance.