• Chinese Optics Letters
  • Vol. 20, Issue 3, 031301 (2022)
Gongqing Li, Xiaofeng Duan*, Weifang Yuan, Yongqing Huang, Kai Liu, and Xiaomin Ren
Author Affiliations
  • State Key Laboratory of Information Photonics and Optical Communications, Beijing University of Posts and Telecommunications, Beijing 100876, China
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    DOI: 10.3788/COL202220.031301 Cite this Article Set citation alerts
    Gongqing Li, Xiaofeng Duan, Weifang Yuan, Yongqing Huang, Kai Liu, Xiaomin Ren. Quasi-resonant cavity enhanced photodetector with a subwavelength grating[J]. Chinese Optics Letters, 2022, 20(3): 031301 Copy Citation Text show less
    (a) Schematic structure and (b) schematic layout of the QRCE-PD.
    Fig. 1. (a) Schematic structure and (b) schematic layout of the QRCE-PD.
    Reflectivity of the FPC as a function of wavelength at normal incidence (black solid line) and as a function of incident angle at the 1550 nm wavelength (red dash dot line).
    Fig. 2. Reflectivity of the FPC as a function of wavelength at normal incidence (black solid line) and as a function of incident angle at the 1550 nm wavelength (red dash dot line).
    (a) Electric field intensity distribution and (b) structure parameters of the SWG reflector.
    Fig. 3. (a) Electric field intensity distribution and (b) structure parameters of the SWG reflector.
    (a) Equivalent inclined-ridge cavity structure of the QRCE-PD and (b) schematic diagram of forming region 1 by multiple mutual mirroring.
    Fig. 4. (a) Equivalent inclined-ridge cavity structure of the QRCE-PD and (b) schematic diagram of forming region 1 by multiple mutual mirroring.
    Equivalent multi-region F-P cavity structure of the QRCE-PD, which forms a multi-region RCE-PDs structure together with a built-in photodetector.
    Fig. 5. Equivalent multi-region F-P cavity structure of the QRCE-PD, which forms a multi-region RCE-PDs structure together with a built-in photodetector.
    (a) Normalized electric field intensity distribution and region distribution of the QRCE-PD. (b) Simulated spectral response of QRCE-PD, conventional RCE-PD, and p-i-n photodetector.
    Fig. 6. (a) Normalized electric field intensity distribution and region distribution of the QRCE-PD. (b) Simulated spectral response of QRCE-PD, conventional RCE-PD, and p-i-n photodetector.
    Spectral response of QRCE-PD when tuning the refractive index of the cavity layer of the FPC.
    Fig. 7. Spectral response of QRCE-PD when tuning the refractive index of the cavity layer of the FPC.
    Frequency response of the embedded p-i-n photodiode at -3 V bias.
    Fig. 8. Frequency response of the embedded p-i-n photodiode at -3 V bias.
    NameMaterialDoping (cm3)Thickness (nm)
    P layerInGaAsP3 × 1018300
    Absorption layerInGaAs1 × 1015400
    Spacing layerInGaAsP2 × 10151500
    N layerInP3 × 1018300
    Table 1. Layer Structure of the Embedded p-i-n Photodiode
    Region mWidth (μm)kmηm
    11.120.0670.663
    22.230.1340.887
    33.330.2010.962
    44.430.2670.987
    55.510.3320.996
    Total width16.62Total η0.950
    Table 2. Theoretical Parameters of Each Absorption Region
    ParameterRCE[11]Taper cavity[5]Multi-cavities RCE[15]QRCE
    Absorber thickness (nm)300300350400
    Linewidth (nm)Theoretical0.50.12
    Experimental>600.60.75
    Tuning range (nm)Theoretical28
    Experimental10.2
    Quantum efficiencyTheoretical80%93.2%
    Experimental59%70%70%
    Table 3. Performance Parameters of Different Long Wavelength Devices
    Gongqing Li, Xiaofeng Duan, Weifang Yuan, Yongqing Huang, Kai Liu, Xiaomin Ren. Quasi-resonant cavity enhanced photodetector with a subwavelength grating[J]. Chinese Optics Letters, 2022, 20(3): 031301
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