• Optics and Precision Engineering
  • Vol. 29, Issue 9, 2108 (2021)
Jie CHEN1,*, Bang-jun MA1, Xiao-long WANG1, Tian HAN2, and Jun-sheng LIAO1
Author Affiliations
  • 1Institute of Materials, China Academy of Engineering Physics, Mianyang62908, China
  • 2College of Mechanical Engineering, Southeast University, Nanjing11189, China
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    DOI: 10.37188/OPE.20212909.2108 Cite this Article
    Jie CHEN, Bang-jun MA, Xiao-long WANG, Tian HAN, Jun-sheng LIAO. Verification of redeposition correction in focused ion beam milling by cellular automaton[J]. Optics and Precision Engineering, 2021, 29(9): 2108 Copy Citation Text show less
    Schematic of ion sputtering where S1,S2 correspond to areas of redeposition region A1,A2, respectively
    Fig. 1. Schematic of ion sputtering where S1S2 correspond to areas of redeposition region A1A2, respectively
    Effect of dose of ions on sidewall tilt
    Fig. 2. Effect of dose of ions on sidewall tilt
    Effect of dwell time on redeposition distribution
    Fig. 3. Effect of dwell time on redeposition distribution
    Schematic of traditional sputtering and SLAS path
    Fig. 4. Schematic of traditional sputtering and SLAS path
    Principle schematic of SLAS
    Fig. 5. Principle schematic of SLAS
    Evolution of redeposition process
    Fig. 6. Evolution of redeposition process
    Evolution of trench section in simulation of SLAS
    Fig. 7. Evolution of trench section in simulation of SLAS
    Schematic of sidewall sections before and after SLAS correction
    Fig. 8. Schematic of sidewall sections before and after SLAS correction
    Evolution of trenches upon gradual approaching of single-pixel lines to central area
    Fig. 9. Evolution of trenches upon gradual approaching of single-pixel lines to central area
    Fresnel zone plate fabricated by SLAS-mediated FIB
    Fig. 10. Fresnel zone plate fabricated by SLAS-mediated FIB
    Jie CHEN, Bang-jun MA, Xiao-long WANG, Tian HAN, Jun-sheng LIAO. Verification of redeposition correction in focused ion beam milling by cellular automaton[J]. Optics and Precision Engineering, 2021, 29(9): 2108
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