Jie CHEN, Bang-jun MA, Xiao-long WANG, Tian HAN, Jun-sheng LIAO. Verification of redeposition correction in focused ion beam milling by cellular automaton[J]. Optics and Precision Engineering, 2021, 29(9): 2108

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- Optics and Precision Engineering
- Vol. 29, Issue 9, 2108 (2021)

Fig. 1. Schematic of ion sputtering where S 1,S 2 correspond to areas of redeposition region A 1,A 2, respectively

Fig. 2. Effect of dose of ions on sidewall tilt

Fig. 3. Effect of dwell time on redeposition distribution

Fig. 4. Schematic of traditional sputtering and SLAS path

Fig. 5. Principle schematic of SLAS

Fig. 6. Evolution of redeposition process

Fig. 7. Evolution of trench section in simulation of SLAS

Fig. 8. Schematic of sidewall sections before and after SLAS correction

Fig. 9. Evolution of trenches upon gradual approaching of single-pixel lines to central area

Fig. 10. Fresnel zone plate fabricated by SLAS-mediated FIB

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