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    Journals >Optics and Precision Engineering >Volume 18 >Issue 5 >Page 1166 > Article
    • Optics and Precision Engineering
    • Vol. 18, Issue 5, 1166 (2010)
    Design and thermal analysis of high performance MEMS capacitive pressure sensor
    LV Hao-jie*, HU Guo-qing, ZOU Wei, WU Can-yun, and CHEN Yu-feng
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    LV Hao-jie, HU Guo-qing, ZOU Wei, WU Can-yun, CHEN Yu-feng. Design and thermal analysis of high performance MEMS capacitive pressure sensor[J]. Optics and Precision Engineering, 2010, 18(5): 1166 Copy Citation Text show less
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    LV Hao-jie, HU Guo-qing, ZOU Wei, WU Can-yun, CHEN Yu-feng. Design and thermal analysis of high performance MEMS capacitive pressure sensor[J]. Optics and Precision Engineering, 2010, 18(5): 1166
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