• Acta Photonica Sinica
  • Vol. 52, Issue 10, 1052419 (2023)
Yiwen ZHENG1, Yongzhang CHEN1,2, Qianhao TANG1, Yixin ZHU1..., Yongqin YU1,*, Chenlin DU1,3 and Shuangchen RUAN1,3|Show fewer author(s)
Author Affiliations
  • 1Key Laboratory of Advanced Optical Precision Manufacturing Technology of Guangdong Higher Education Institutes,Shenzhen Technology University,Shenzhen 518118,China
  • 2School of New Materials and New Energies,Shenzhen Technology University,Shenzhen 518118,China
  • 3Sino-German School of Intelligent Manufacturing,Shenzhen Technology University,Shenzhen 518118,China
  • show less
    DOI: 10.3788/gzxb20235210.1052419 Cite this Article
    Yiwen ZHENG, Yongzhang CHEN, Qianhao TANG, Yixin ZHU, Yongqin YU, Chenlin DU, Shuangchen RUAN. Femtosecond Laser Processing Micro-cantilever Thin-film Fiber Optic Acoustic Sensor[J]. Acta Photonica Sinica, 2023, 52(10): 1052419 Copy Citation Text show less
    References

    [1] Yuanyuan WANG, Hongwei MA, Guangming ZHANG et al. Research on ultrasonic non-destructive testing system based on fiber bragg grating. Modern Electronics Technique, 45, 143-146(2022).

    [2] Jing LIU, Yuanji LI, Jinxia FENG et al. High sensitivity fiber-optic Fabry Pérot sensor for photoacoustic imaging. Journal of Quantum Optics, 27, 123-129(2021).

    [3] Zhaoyong WANG, Bin LU, Lei YE et al. Distributed optical fiber acoustic sensing and its application to seismic wave monitoring. Laser & Optoelectronics Progress, 58, 1306006(2021).

    [4] E MACCIONI, N BEVERINI, M CALAMAI et al. Optical fibre hydrophones for navigation systems, 1-4(2015).

    [5] C Y MAN, B MOSS, E LEWIS et al. A portable multi-megabit optical fibre sonar sensor system, 1-4(2013).

    [6] G A CRANCH, P J NASH, C K KIRKENDALL. Large-scale remotely interrogated arrays of fiber-optic interferometric sensors for underwater acoustic applications. IEEE Sensors Journal, 3, 19-30(2003).

    [7] S LORENZO, O SOLGAARD. Acoustic Localization with an optical fiber silicon microphone system. IEEE Sensors Journal, 22, 9408-9416(2022).

    [8] Cheng LI, Shanshan LU, Chao ZHONG et al. High-sensitivity low-frequency Fabry-Perot ultrasonic hydrophone with chitosan diaphragm. IEEE Sensors Journal, 22, 6669-6676(2022).

    [9] Chen LI, Xueqi LU, Caibin YU et al. Fiber-optic acoustic sensor based on multi-layered graphene material. Acta Optica Sinica, 38, 199-203(2018).

    [10] Bin LIU, Guangqi ZHENG, Ailin WANG et al. Optical fiber Fabry-Perot acoustic sensors based on corrugated silver diaphragms. IEEE Transactions on Instrumentation and Measurement, 69, 3874-3881(2020).

    [11] M CONSALES, S CAMPOPIANO, A CUTOLO et al. Carbon nanotubes thin films fiber optic and acoustic VOCs sensors: Performances analysis. Sensors and Actuators B: Chemical, 118, 232-242(2006).

    [12] Han ZHOU, Bingkun WU, Mingguang SHAN et al. Optical fiber Fabry-Perot acoustic sensor based on large PDMS diaphragm, 11053, 110531W(2019).

    [13] Qiangqiang HUANG, Shuo DENG, Min LI et al. Fabry-Perot acoustic sensor based on a thin gold diaphragm. Optical Engineering, 59, 064105(2020).

    [14] Zhuowei XIANG, Weiyu DAI, Weiying RAO et al. A gold diaphragm-based Fabry-Perot interferometer with a fiber-optic collimator for acoustic sensing. IEEE Sensors Journal, 21, 17882-17888(2021).

    [15] Ning ZHOU, Pinggang JIA, Jia LIU et al. MEMS-based reflective intensity-modulated fiber-optic sensor for pressure measurements. Sensors, 20, 2233(2020).

    [16] P POLVGERINOS, L D SENEVIRATNE, K ALTHOEFER. Modeling of light intensity-modulated fiber-optic displacement sensors. IEEE Transactions on Instrumentation and Measurement, 60, 1408-1415(2011).

    [17] J GOMEZ, J R CASAS, S VILLALBA. Structural health monitoring with distributed optical fiber sensors of tunnel lining affected by nearby construction activity. Automation in Construction, 117, 103261(2020).

    [18] L M CHAN, A R PARKER, A PIAZZA et al. Fiber-optic sensing system: overview, development and deployment in flight at NASA, 71-73(2015).

    [19] R CORREIA, S JAMES, S W LEE et al. Biomedical application of optical fibre sensors. Journal of Optic, 20, 073003(2018).

    [20] D IANNUZZI, S DELADI, V J GADGIL et al. Monolithic fiber-top sensor for critical environments and standard applications. Applied Physics Letters, 88, 53501(2006).

    [21] Fengxin XIN, Dewang YANG, Chao LI et al. Detection of CO2 concentration using a fiber-optic cantilever acoustic sensor in 2.0-mum band, 11617, 1161722.

    [22] F ALBRI, J LI, R R J MAIER et al. Laser machining of sensing components on the end of optical fibres. Journal of Micromechanics and Microengineering, 23, 45021(2013).

    [23] T LAUWERS, A GLIERE, S BASROUR. An all-optical photoacoustic sensor for the detection of trace gas. Sensors, 20, 3967(2020).

    [24] Jun LI, F ALBRI, R R J MAIER et al. A micro-machined optical fiber cantilever as a miniaturized pH sensor. IEEE Sensors Journal, 15, 7221-7228(2015).

    [25] Ke CHEN, Xinlei ZHOU, Zhenfeng GONG et al. Research on Fiber-optic Cantilever-enhanced photoacoustic spectroscopy for trace gas detection, 10621, 1062108(2018).

    [26] Jiale YONG, Qing YANG, Xun HOU et al. Nature-inspired superwettability achieved by femtosecond laser. Ultrafast Science, 2022, 51(2022).

    [27] Yongzhang CHEN, Yiwen ZHENG, Haibing XIAO et al. A high-sensitivity EFPI acoustic sensor based on silicone rubber diaphragm, 12507, 125072G(2023).

    Yiwen ZHENG, Yongzhang CHEN, Qianhao TANG, Yixin ZHU, Yongqin YU, Chenlin DU, Shuangchen RUAN. Femtosecond Laser Processing Micro-cantilever Thin-film Fiber Optic Acoustic Sensor[J]. Acta Photonica Sinica, 2023, 52(10): 1052419
    Download Citation