Fig. 1. Schematic diagram of the cylindrical cathode and the electromagnetic coils.筒形阴极及电磁线圈结构示意图

Fig. 2. The distribution of the magnetic induction line vs. the current in electromagnetic coils: (a) 0 A; (b) 5 A; (c) 10 A; (d) 15 A; (e) –5 A; (f) –10 A and (g) –15 A. The purple dotted line is the center axis of the cylindrical cathode and the magnified area of the cylindrical cathode is marked by the blue square.磁感线分布与电磁线圈电流的关系, 右侧为筒形阴极内的磁感线分布放大图　(a) 0 A; (b) 5 A; (c) 10 A; (d) 15 A; (e) –5 A; (f) –10 A; (g) –15 A. 图中紫色虚线为筒形阴极中央轴, 蓝色方框中的部分为筒形阴极的放大区域

Fig. 3. The Ar⁺ ion distribution in the cylindrical cathode vs. the current in electromagnetic coils: (a) 0 A; (b) 5 A; (c) 10 A; (d) 15 A; (e) –5 A; (f) –10 A and (g) –15 A. The purple dotted line is the center axis of the cylindrical cathode, the gray square is the target and the blue line is the contour line of 1×10¹⁷ m^–3. 不同电磁线圈电流条件下筒形阴极内Ar⁺离子分布　(a) 0 A; (b) 5 A; (c) 10 A; (d) 15 A; (e) –5 A; (f) –10 A; (g) –15 A. 图中紫色虚线为中央旋转轴, 灰色区域为靶材, 蓝线为1×10¹⁷ m^–3的密度等值线

Fig. 4. Threshold voltage of HiPIMS discharge vs. the current in the electromagnetic coil.HiPIMS放电的起辉电压随电磁线圈电流的变化

Fig. 5. The plasma density distribution vs. the current in electromagnetic coils: (a) 0 A; (b) 5 A; (c) 10 A; (d) 15 A; (e) –5 A; (f) –10 A and (g) –15 A. The purple dotted line is the center axis of the cylindrical cathode.等离子体密度分布与电磁线圈电流的关系　(a) 0 A; (b) 5 A; (c) 10 A; (d) 15 A; (e) –5 A; (f) –10 A; (g) –15 A. 图中紫色虚线为中央旋转轴

Fig. 6. Spatial distribution of the deposition rates: (a) Deposition rate on the central axis depends on the diffusion distance and the coil currents; (b) deposition rate at the distance of 8 cm from the cylindrical cathode at different coil currents; (c) deposition rate distribution at different distances from the cylindrical cathode when the coil current is 15 A.沉积速率的空间分布　(a) 不同线圈电流下中央轴沉积速率随扩散距离的变化; (b) 不同线圈电流下距筒形阴极8 cm处截面上的沉积速率分布; (c) 线圈电流15 A时不同距离的截面上的沉积速率分布

Fig. 7. The plasma flow pictures vs. the electromagnetic coil currents: (a) The coil current is positive; (b) the coil current is negative.不同线圈电流时的等离子体束流辉光照片　(a) 线圈电流为正; (b) 线圈电流为负

Fig. 8. The OES intensity at the center axis of cylindrical cathode vs. the electromagnetic coil currents.不同的线圈电流时筒形阴极中央轴上的光谱强度

Fig. 9. Distribution of the deposition rate when the electromagnetic coil current is (a) 15 A and (b) –15 A.(a)线圈电流为15 A时沉积速率的分布; (b)线圈电流为–15 A时沉积速率的分布

Table 2. Target discharge width and maximum plasma density.