[6] BELAK J, STOWERS I F. A molecular dynamics model of the thogonal cutting process[C]Proceeding of the ASPE annual conference. Rochester, New Yk, 1990: 23 28.

[7] BELAK J, BOERCKER D B, STOWERS I F. Simulation of nanometer-scale deformation of metallic and ceramic surfaces[J]. MRS Bullletin, 18, 55-60(1993).

[8] KOMANDURI R, CHANDRASEKARAN N, RAFF L M. Effect of tool geometry in Nanometric cutting: a molecular dynamics simulation approach[J]. Wear, 219, 84-97(1998).

[9] YAN Y D, SUN T, DONG S. Molecular dynamics simulation of processing using AFM pin tool[J]. Applied Surface Science, 252, 7523-7531(2006).

[10] FANG F Z, WU H, ZHOU W. A study on mechanism of nano-cutting single crystal silicon[J]. Journal of Materials Processing Technology, 184, 407-410(2007).

[11] GOEL S, LUO X C, AGRAWAL A. Diamond machining of silicon: a review of advances in molecular dynamics simulation[J]. International Journal of Machine Tools and Manufacture, 88, 131-164(2015).

[12] TANG Q H, CHEN F H. MD simulation of phase transformations due to nanoscale cutting on silicon monocrystals with diamond tip[J]. Journal of Physics D: Applied Physics, 39, 3674-3679(2006).

[13] SHEN T M, TUNG Y T, CHENG Y Y, et al. Molecular Dynamic simulation study of stress memization in Si dislocations[C]Proceedings of 2012 international electron devices meeting. Francisco: IEEE, 2012: 30.1.1 30.1.4.

[16] ERHART P, ALBE K. Analytical potential for atomistic simulations of silicon, carbon, and silicon carbide[J]. Physical Review B, 71, 035211(2005).

[17] MARAS E, TRUSHIN O, STUKOWSKI A. Global transition path search for dislocation formation in Ge on Si[J]. Computer Physics Communications, 205, 13-21(2016).