Zhibin WANG, Yao TIAN, Pengcheng SUN, Zheng ZHANG, Feng ZHANG, Yunlong ZHANG, Mingyin JIAO. PSD analysis and control strategy of optical component polishing[J]. Journal of Applied Optics, 2022, 43(4): 772
- Journal of Applied Optics
- Vol. 43, Issue 4, 772 (2022)
Fig. 1. Effect of random profile amplitude on PSD curves
Fig. 2. Effect of random profile frequency on PSD curves
Fig. 3. Effect of random profile phase on PSD curves
Fig. 4. Effect of random frequency and amplitude decrease on PSD curves
Fig. 5. Generated six curves of random profile
Fig. 6. Relationship between PSD curves with RMS and RMS Slope
Fig. 7. Diagram of several typical NC machining paths
Fig. 8. PSD curve with spiral path
Fig. 9. PSD curve analysis with grid line path
Fig. 10. PSD curve with pseudorandom path
Fig. 11. PSD curve with Peano path
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Table 1. Evaluation parameters of six curves of random profile with RMS approximation
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