Wujun LYU, Sen HAN, Jidong XU, Yuhang SHEN, Linghua ZHANG, Ying YANG, Jingming GUO. Spectrum analysis of low frequency vibration in interferometry[J]. Journal of Applied Optics, 2024, 45(5): 1019
- Journal of Applied Optics
- Vol. 45, Issue 5, 1019 (2024)
Fig. 1. RMS phase error of PSI algorithm
Fig. 2. Phase distribution to be measured
Fig. 3. Phase error diagram
Fig. 4. 2D data phase error diagram
Fig. 5. Experimental surface interferogram and surface phase
Fig. 6. Phase error diagram
Fig. 7. 2D data phase error diagram
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Table 1. Simulation results
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Table 2. Experimental results
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