An arrayed X-ray source rather than traditional X-ray tube with absorption mask was proposed to generate structured light, based on the analysis of grating absorption efficiency and the coherence of X-ray source. According to the intensity distribution of interferogram, the influence of absorption efficiency on visibility of interference fringes was presented. With respect to the state of art micro-fabrication, it was impossible to realize the absorption grating required. The optimal structure of arrayed source was given from the analysis of spatial coherence. In order to verify the feasibility of the method, an arrayed X-ray tube was fabricated and relative measurement was performed.