Measurement and Resolution Method for Intra-Pixel Response of Front-Illuminated CMOS Sensors

Hu Zhuoyue; Zhou Xiaodong; Tang Yujun; Chen Fansheng

doi:10.3788/CJL201946.0910002

Journals >Chinese Journal of Lasers >Volume 46 >Issue 9 >Page 910002 > Article

Chinese Journal of Lasers
Vol. 46, Issue 9, 910002 (2019)

Measurement and Resolution Method for Intra-Pixel Response of Front-Illuminated CMOS Sensors

Hu Zhuoyue^1、2, Zhou Xiaodong³, Tang Yujun¹, and Chen Fansheng^1、*

Author Affiliations

¹Key Laboratory of Intelligent Infrared Perception, Shanghai Institute of Technical Physics, Chinese Academy of Sciences, Shanghai 200083, China

²University of Chinese Academy of Sciences, Beijing 100049, China

³Shanghai Academy of Spaceflight Technology, Shanghai 201109, China

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DOI: 10.3788/CJL201946.0910002 Cite this Article Set citation alerts

Hu Zhuoyue, Zhou Xiaodong, Tang Yujun, Chen Fansheng. Measurement and Resolution Method for Intra-Pixel Response of Front-Illuminated CMOS Sensors[J]. Chinese Journal of Lasers, 2019, 46(9): 910002 Copy Citation Text

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Fig. 1. Intra-pixel response test system

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Fig. 2. Internal structure of pixel

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Fig. 3. Normalized pixel response versus position of point target

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Fig. 4. Fitting and measured values of pixel response of point target imaging at different positions

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Radius of hole /μm	FWHM /μm	a /μm	b /μm	c /μm	d /μm	r_es /%
37.5	6.535	18.0	13.5	18.0	18.5	8.74
65.0	7.948	18.5	12.5	18.5	15.0	9.68
65.0	8.066	18.0	16.0	19.5	16.0	10.39
65.0	8.184	18.5	16.5	19.0	17.0	8.65

Table 1. Parameters obtained by fitting

Hu Zhuoyue, Zhou Xiaodong, Tang Yujun, Chen Fansheng. Measurement and Resolution Method for Intra-Pixel Response of Front-Illuminated CMOS Sensors[J]. Chinese Journal of Lasers, 2019, 46(9): 910002

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