In the present study, PCWD is proposed to measure the surface profile based on FDA. PCWD uses the constant value of the linear-fitted phase in the wavenumber domain to compensate for the noise-induced error in the slope of the linear-fitted phase. Further, a simulation is performed to study the characteristics of PCWD. Unexpectedly, some kinds of noise will increase the measurement error for PCWD. However, the negative effect cannot deny the good performance of PCWD in measuring the entire surface. The experimental result also agrees with the simulation, which proves that PCWD has better measurement accuracy and stability. Our study provides the white-light scanning interferometer with a method for determining the surface profile based on FDA with good noise resistance and helps the white-light scanning interferometer adapt to poor environments.
Songjie Luo, Ziyang Chen, Panfeng Ding, Jixiong Pu. White-Light Interferometry Based on Phase Compensation in Wavenumber Domain[J]. Chinese Journal of Lasers, 2022, 49(11): 1104002