[1] D. Nyyssonen, Appl. Opt. 16, 2223 (1977).
[2] D. Nyyssonen and R. D. Larrabee, J. Res. Nat. Bur. Stand. 92, 187 (1987).
[3] R. Barakat, Opt. Acta 17, 337 (1970).
[4] R. Barakat, Opt. Acta 16, 205 (1969).
[5] D. Nyyssonen, J. Opt. Soc. Am. 72, 1425 (1982).
[6] E. C. Kintner, Appl. Opt. 17, 2747 (1978).
[7] H. H. Hopkins, Photogr. Sci. Eng. 21, 114 (1977).
[8] H. H. Hopkins, J. Opt. Soc. Am. 47, 508 (1957).
[9] C. P. Kirk, "Precision measurement of microscope images" PhD Thesis (University of Leeds, 1985).
[10] C. P. Kirk, Appl. Opt. 26, 3417 (1987).
[11] C.-M. Yuan, "Modeling of optical alignment and metrology in VLSI manufacturing” PhD Thesis (Carnegie-Mellon University, 1989).
[12] C.-M. Yuan and A. J. Strojwas, J. Opt. Soc. Am. A 8, 778 (1991).
