By optimizing the back reflection electrode of the thin-film silicon-based solar cell, the back reflection electrode surface appears the homogeneous pyramid-structure, which can increase the effective optical-path of the incoming light, and the photon capture rate, thereby the photoelectric conversion efficiency of the thin-film silicon solar cells is improved. In this paper, the Ag/AZO(ZnO:Al) conductive films were prepared on glass substrates by magnetron sputtering. In the case of the other sputtering parameters being optimal, the photovoltaic properties and surface morphology of AZO/Ag of the different substrate temperatures were investigated emphatically. The study shows that the film haze factor in the visible region first increases and then decreases; when the substrate temperature is 500℃, the haze factor of the film is the maximum with an average of more than 95% in the visible range; the resistivity of the film increases gradually with the increase of the substrate temperature, and the resistivity increases quickly when the substrate temperature is higher than 500℃. Considering the optical and electrical properties of the conductive films, when the substrate temperature is 500℃, the surface haze value of the tandem conductive films is the best and its resistivity is very small, which will play a significant role in improving the performance of the solar cells.