The effect of shape, height, and interparticle spacing of Au nanoparticles (NPs) on the sensing performance of Au NP array is systematically investigated. Lengthening the major axis of elliptical NPs with the minor axis kept constant will cause the redshift of the local surface plasmon (LSP) resonance mode, enhance the sensitivity, and widen the resonance peaks. Larger height corresponds to smaller LSP resonance wavelength and narrower resonance peak. With each NP size unchanged, larger interparticle spacing corresponds to larger resonance wavelength and smaller full-width at half-maximum (FWHM). Moreover, duty cycle is important for sensitivity, which is largest when the duty cycle is 0.4.