• Acta Photonica Sinica
  • Vol. 39, Issue 11, 2045 (2010)
ZHAO Ruidong and SUN Ping*
Author Affiliations
  • [in Chinese]
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    DOI: Cite this Article
    ZHAO Ruidong, SUN Ping. Shape Measurement Based on Phaseshifting Electronic Speckle Pattern Interferometry[J]. Acta Photonica Sinica, 2010, 39(11): 2045 Copy Citation Text show less

    Abstract

    In order to obtain accurate measurement of 3D shape, a shape measurement method using phaseshifting electronic speckle pattern interferometry(ESPI) is proposed. A carrier pattern on the object surface is produced by electronic speckle pattern interferometry. The carrier pattern is curved because of the modulation of the altitude of the object surface, which causes the changes of the phase of the carrier pattern. Then the phase changes of the object surface can be extracted by phaseshifting algorithms. Finally the shape of the object surface can be derived by the relationship between the phase changes and the altitude of the surface. The principle of the proposed method is introduced. Surface of a small ball is tested using the method. The experimental results prove that the phaseshifting electronic speckle pattern interferometry is useful for the measurement of an object surface,and indicate that the method has the virtue of high sensitivity because the carrier pattern is produced by electronic speckle pattern interferometry.
    ZHAO Ruidong, SUN Ping. Shape Measurement Based on Phaseshifting Electronic Speckle Pattern Interferometry[J]. Acta Photonica Sinica, 2010, 39(11): 2045
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