• Optics and Precision Engineering
  • Vol. 29, Issue 11, 2622 (2021)
Zu-rong QIU*, Lei ZHOU, Jie XUE, and Zhen YU
Author Affiliations
  • State Key Laboratory of Precision Measuring Technology and Instrument, Tianjin University, Tianjin300072, China
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    DOI: 10.37188/OPE.20212911.2622 Cite this Article
    Zu-rong QIU, Lei ZHOU, Jie XUE, Zhen YU. Angle error compensation of precision reducer tester[J]. Optics and Precision Engineering, 2021, 29(11): 2622 Copy Citation Text show less
    Angle measuring system of precision reducer tester
    Fig. 1. Angle measuring system of precision reducer tester
    Schematic diagram of embedded control and signal acquisition system
    Fig. 2. Schematic diagram of embedded control and signal acquisition system
    Experimental setup for calibration of angle measurement error
    Fig. 3. Experimental setup for calibration of angle measurement error
    Flow chart of automatic calibration
    Fig. 4. Flow chart of automatic calibration
    Operation interface of automatic calibration system
    Fig. 5. Operation interface of automatic calibration system
    Angle measurement error data and harmonic compensation curve
    Fig. 6. Angle measurement error data and harmonic compensation curve
    Angle measurement error model obtained by training point and harmonic neural network combined compensation method
    Fig. 7. Angle measurement error model obtained by training point and harmonic neural network combined compensation method
    Comparison of residuals between error harmonic method and harmonic neural network combined compensation method
    Fig. 8. Comparison of residuals between error harmonic method and harmonic neural network combined compensation method
    Schematic diagram of autocollimator cross line tilt
    Fig. 9. Schematic diagram of autocollimator cross line tilt
    Data drift of autocollimator in X-axis
    Fig. 10. Data drift of autocollimator in X-axis
    阶次幅值/(″)相位/(°)
    1234512345
    0-0.48-1.15-0.56-1.08-0.7790.0090.0090.0090.0090.00
    10.540.700.580.580.68-55.49-48.22-62.46-53.58-59.87
    21.571.391.411.301.3395.2098.81103.7795.74101.36
    30.20-0.280.11-0.150.22-38.6255.49-51.409.5563.09
    4-0.53-0.440.33-0.54-0.44-33.05-68.9074.81-66.18-65.83
    5-0.180.010.120.220.0916.4476.4030.46-75.672.04
    60.380.420.440.440.3560.3443.5952.2195.1050.46
    70.03-0.190.20-0.40-0.08-56.21-53.814.63-75.21-45.64
    80.630.570.760.630.59-46.74-75.38-47.13-36.71-78.52
    90.240.140.210.20-0.18-16.7356.57-90.62-15.6436.60
    10-0.34-0.24-0.30-0.370.0340.93-11.4730.6050.2226.42
    11-0.25-0.240.14-0.02-0.0920.42-35.8631.21-10.0112.17
    Table 1. Amplitude and phase obtained by error harmonic method
    序号圆光栅角位置/(°)未补偿测角误差/(″)谐波法补偿后/(″)谐波-神经网络组合法补偿后/(″)
    18.170.000.000.00
    223.17-1.66-0.80-0.13
    338.17-1.530.13-0.09
    453.18-2.52-0.83-0.48
    568.18-2.49-0.66-0.66
    683.18-1.750.69-0.59
    798.18-2.120.33-0.24
    8113.17-2.66-1.29-0.38
    9128.17-0.51-0.16-0.23
    10143.17-0.59-0.46-0.32
    11158.18-0.35-0.51-0.84
    12173.171.891.02-0.34
    13188.180.89-0.02-0.29
    14203.18-0.70-0.51-0.28
    15218.18-1.220.06-0.33
    16233.18-1.580.050.03
    17248.18-2.54-0.45-0.78
    18263.18-2.090.920.10
    19278.18-3.010.26-0.42
    20293.18-3.47-1.08-0.11
    21308.18-1.500.01-0.10
    22323.17-1.79-0.44-0.09
    23338.18-1.38-0.34-0.45
    24353.181.301.520.02
    Table 2. Angle measurement error before and after compensation of verification points
    Zu-rong QIU, Lei ZHOU, Jie XUE, Zhen YU. Angle error compensation of precision reducer tester[J]. Optics and Precision Engineering, 2021, 29(11): 2622
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