• Semiconductor Optoelectronics
  • Vol. 45, Issue 2, 286 (2024)
WANG Yumeng1,2,3, YANG Fan1,2, CHEN Qingrong1,2, YU Siyang1,2..., ZHANG Xi1,2, SUN Si1,2 and YAN Wei1,2,3|Show fewer author(s)
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  • 1[in Chinese]
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    DOI: 10.16818/j.issn1001-5868.2023121202 Cite this Article
    WANG Yumeng, YANG Fan, CHEN Qingrong, YU Siyang, ZHANG Xi, SUN Si, YAN Wei. Error Compensation of Long Stroke Displacement Instrument Interference Ranging System[J]. Semiconductor Optoelectronics, 2024, 45(2): 286 Copy Citation Text show less
    References

    [1] Berkovic G, Shafir E. Optical methods for distance and displacement measurements[J]. Adv. Opt. Photon., 2012,4: 441-471.

    [4] Wu Q, Teng Y T, Wang X M, et al. Vibration error compensation algorithm in the development of laser interference absolute gravimeters [J]. Geosci. Instrum.Methods Data Syst., 2021, 10(1): 113-122.

    [12] Minsoo K, Changsu P, Soonkyu J, et al. Real-time compensation of simultaneous errors induced by optical phase difference and substrate motion in scanning beam laser interference lithography system [J]. EEE/ASME Trans.Mechatron., 2018, 23(4): 1491-1500.

    [16] Edlén B. The refractive index of air[J]. Metrologia, 1966, 2(2): 71.

    [17] Birch K P, M J Downs. An updated Edlén equation for the refractive index of air[J]. Metrologia, 1993, 30(3): 155.

    WANG Yumeng, YANG Fan, CHEN Qingrong, YU Siyang, ZHANG Xi, SUN Si, YAN Wei. Error Compensation of Long Stroke Displacement Instrument Interference Ranging System[J]. Semiconductor Optoelectronics, 2024, 45(2): 286
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