• Acta Photonica Sinica
  • Vol. 38, Issue 2, 281 (2009)
LI Yu-jie*, XIE Kai, XU Jing, HAN Yu, TU Sheng-yi, and LI Yun-peng
Author Affiliations
  • [in Chinese]
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    DOI: Cite this Article
    LI Yu-jie, XIE Kai, XU Jing, HAN Yu, TU Sheng-yi, LI Yun-peng. Fabrication of Germanium Inverse Opal Three-dimensional Photonic Crystal by LPCVD[J]. Acta Photonica Sinica, 2009, 38(2): 281 Copy Citation Text show less

    Abstract

    Monodisperse silica microspheres were assembled into three-dimensional colloidal crystal template with long-ranged order by solvent vaporization convection self-assembly method.Low Pressure Chemical Vapour Deposition(LPCVD) method was used to fill the voids of silica colloidal crystals template with high refractive index material germanium,then silica colloidal crystals template was removed by an acid etching.Thus germanium three-dimensional inverse opal photonic crystal was obtained.The modality,component and structure of the resulted samples were characterized by scanning electron microscopy,X-ray diffraction and UV-VIS-NIR spectroscopy.Results show that germanium of high crystalline quality is homogeneously distributed inside the voids of silica template.The filling fraction of germanium can be controlled by changing the conditions of LPCVD.The samples have optic reflective apex and show the photonic band gap effects.The experiment optic capability is inosculated with the calculated one.
    LI Yu-jie, XIE Kai, XU Jing, HAN Yu, TU Sheng-yi, LI Yun-peng. Fabrication of Germanium Inverse Opal Three-dimensional Photonic Crystal by LPCVD[J]. Acta Photonica Sinica, 2009, 38(2): 281
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