• Chinese Optics Letters
  • Vol. 4, Issue 9, 550 (2006)
Fengli Wang*, Zhanshan Wang, Jingtao Zhu, Zhong Zhang, Wenjuan Wu, Shumin Zhang, and Lingyan Chen
Author Affiliations
  • Institute of Precision Optical Engineering, Department of Physics, Tongji University, Shanghai 200092
  • show less
    DOI: Cite this Article Set citation alerts
    Fengli Wang, Zhanshan Wang, Jingtao Zhu, Zhong Zhang, Wenjuan Wu, Shumin Zhang, Lingyan Chen. Determination of the deposition rate of DC magnetron sputtering in fabrication of X-ray supermirrors[J]. Chinese Optics Letters, 2006, 4(9): 550 Copy Citation Text show less
    References

    [1] K. D. Joensen, F. E. Christensen, H. W. Schnopper, P. Gorenstein, J. Susini, P. Hoghoj, R. Hustache, J. Wood, and K. Parker, Proc. SPIE 1736, 239 (1992).

    [2] K. Yamashita, P. J. Serlemitsos, J. Tueller, S. D. Barthelmy, L. M. Bartlett, K.-W. Chan, A. Furuzawa, N. Gehrels, K. Haga, H. Kunieda, P. Kurczynski, G. Lodha, N. Nakajo, N. Nakamura, Y. Namba, Y. Ogasaka, T. Okajima, D. Palmer, A. Parsons, Y. Soong, C. M. Stahl, H. Takata, K. Tamura, Y. Tawara, and B. Teegarden, Appl. Opt. 37, 8067 (1998).

    [3] C. Morawe, E. Ziegler, J. C. Peffen, and I. V. Kozhevnikov, Nucl. Instr. Meth. A 493, 198 (2002).

    [4] M. F. Silva and J. R. Nicholls, Surf. and Coat. Technol. 142-144, 934 (2001).

    [5] T. Seino, Y. Kawakubo, K. Nalajima, and M. Kamei, Vacuum 51, 791 (1998).

    [6] S. Hong, E. Kim, Z.-T. Jiang, B.-S. Bae, K. No, S.-G. Lim, S.-G. Woo, and Y.-B. Koh, Mater. Sci. Eng. B 45, 98 (1997).

    [7] A. A. Fursenko, A. O. Galjukov, Y. N. Makarov, D. S. Lutovinov, and M. S. Ramm, J. Crystal Growth 148, 155 (1995).

    [8] U. H. Kwon, S. H. Choi, Y. H. Park, and W. J. Lee, Thin Solid Films 475, 17 (2005).

    [9] S. D. Ekpe, L. W. Bezuidenhout, and S. K. Dew, Thin Solid Films 474, 330 (2005).

    [10] X. Q. Meng, X. J. Fan, and H. X. Guo, Thin Solid Films 335, 279 (1998).

    [11] W.-J. Wu, Z.-S. Wang, Z. Zhang, H.-C. Wang, F.-L. Wang, S.-J. Qin, and L.-Y. Chen, Optical Technique (in Chinese) 31, 537 (2005).

    [12] B. Ma, Z. Wang, H. Wang, F. Wang, W. Wu, Z. Zhang, S. Qin, and L. Chen, Acta Opt. Sin. (in Chinese) 25, 1581 (2005).

    [13] F. Wang, Z. Wang, S. Qin, W. Wu, Z. Zhang, H. Wang, and L. Chen, Chin. Opt. Lett. 3, 425 (2005).

    [14] F.-L. Wang, Z.-S. Wang, Z. Zhang, W.-J. Wu, H.-C. Wang, S.-M. Zhang, S.-J. Qin, and L.-Y. Chen, Opt. Precision Eng. (in Chinese) 13, 28 (2005).

    [15] W.-J. Wu, Z.-S. Wang, S.-J. Qin, F.-L. Wang, H.-C. Wang, Z. Zhang, L.-Y. Chen, X.-D. Xu, and S.-J. Fu, Opt. Precision Eng. (in Chinese) 12, 226 (2004).

    CLP Journals

    [1] Lichao Zhang, Jinsong Gao. Method to accurate calibrate deposition rates of EUV multilayer coatings[J]. Chinese Optics Letters, 2013, 11(s1): S10605

    [2] Moyan Tan, Haochuan Li, Qiushi Huang, Hongjun Zhou, Tonglin Huo, Xiaoqiang Wang, Jingtao Zhu. Mo/Si aperiodic multilayer broadband reflective mirror for 12.5–28.5-nm wavelength range[J]. Chinese Optics Letters, 2011, 9(2): 023102

    [3] Liqin Liu, Zhanshan Wang, Jingtao Zhu, Zhong Zhang, Moyan Tan, Qiushi Huang, Rui Chen, Jing Xu, Lingyan Chen. Intrinsic stress analysis of sputtered carbon film[J]. Chinese Optics Letters, 2008, 6(5): 384

    Fengli Wang, Zhanshan Wang, Jingtao Zhu, Zhong Zhang, Wenjuan Wu, Shumin Zhang, Lingyan Chen. Determination of the deposition rate of DC magnetron sputtering in fabrication of X-ray supermirrors[J]. Chinese Optics Letters, 2006, 4(9): 550
    Download Citation