Sijia XU, Yanhao YU, Qidai CHEN. Water-assisted Femtosecond Laser Silicon Carbide Micro-hole Machining（Invited）[J]. Acta Photonica Sinica, 2021, 50(6): 66
- Acta Photonica Sinica
- Vol. 50, Issue 6, 66 (2021)
Fig. 1. Schematic of the experimental set up
Fig. 2. The SEM image and EDS analysis of micro-hole
Fig. 3. Depth and diameter of the hole versus pulse energy
Fig. 4. The SEM images and schematic diagram of micro-holes processed at different intial processing depths
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