• Chinese Journal of Lasers
  • Vol. 39, Issue 9, 906001 (2012)
Zhou Yujie*, Feng Liqun, and Sun Junqiang
Author Affiliations
  • [in Chinese]
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    DOI: 10.3788/cjl201239.0906001 Cite this Article Set citation alerts
    Zhou Yujie, Feng Liqun, Sun Junqiang. Etching Characteristics of MgO Doped Lithium Niobate in Inductively Coupled Plasma[J]. Chinese Journal of Lasers, 2012, 39(9): 906001 Copy Citation Text show less
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    [2] Yan Boxia, Bi Yong, Wang Dongdong et al.. Compact and highly efficient 3.8 W intracavity frequency-doubled Nd:YVO4/PPMgLN green laser[J]. Chinese J. Lasers, 2011, 38(3): 0302007

    [3] Liu Tong, Wang Xiaobo, Liu Lei et al.. Mid-infrared synchronously pumped picosecond optical parametric oscillator based on PPMgLN crystal[J]. Chinese J. Lasers, 2011, 38(12): 1202003

    [4] Yang Dingzhong, Jiang Peipei, Chen Tao et al.. PPMgLN-based high power optical parametric oscillator pumped by a pulsed fiber laser[J]. Chinese J. Lasers, 2010, 37(1): 34~37

    [5] T. Takaoka, M. Fujimura, T. Suhara. Fabrication of ridge waveguides in LiNbO3 thin film crystal by proton-exchange accelerated etching[J]. Electron. Lett., 2009, 45(18): 940~941

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    [7] T. Kishimoto, K. Nakamura. Periodically poled MgO-doped stoichiometric LiNbO3 wavelength converter with ridge-type annealed proton-exchanged waveguide[J]. IEEE Photon. Technol. Lett., 2011, 23(3): 161~163

    [8] O. Tadanaga, M. Asobe, H. Miyazawa et al.. Efficient 1.55 μm-band quasi-phase-matched ZnO-doped LiNbO3 wavelength converter with high damage resistance[J]. Electron. Lett., 2003, 39(21): 1525~1527

    [9] J. Hopwood. Review of inductively coupled plasmas for plasma processing[J]. Plasma Sources Sci. Technol., 1992, 1(2): 109~116

    [10] N. Mitsugi, H. Nagata, K. Shima et al.. Challenges in electron cyclotron resonance plasma etching of LiNbO3 surface for fabrication of ridge optical waveguides[J]. J. Vacuum Sci. Technol. A, 1998, 16(4): 2245~2251

    [11] H. Nagata, N. Mitsugi, K. Shima et al.. Growth of crystalline LiF on CF4 plasma etched LiNbO3 substrates[J]. J. Cryst. Growth, 1998, 187(3): 573~576

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    Zhou Yujie, Feng Liqun, Sun Junqiang. Etching Characteristics of MgO Doped Lithium Niobate in Inductively Coupled Plasma[J]. Chinese Journal of Lasers, 2012, 39(9): 906001
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