Super resolution, which allows the readout of information beyond the optical cutoff frequency given by 2NA/λ, is an alternate way to increase the recording density without the need to directly reduce the spot size by increasing NA and reducing λ. Ge-Sb-Te is a kind of phase-change optical recording material with good performance. It may used to be mask layer in the super-resolution optical disks. In this paper, the relation of the optical parameters (reflectivity and R m/R c) and the film thickness of the structure of the multi-layers of read-only super-resolution optical disks were studied with method of eigenmatrix of multi-layer films. The ideal result of thickness for each layer is given. The read-only super-resolution optical disks were fabricated by RF magnetron sputtering technology. The optical properties were measured.