[1] KOZHEVNIKOV I V, YAKSHIN A E, BIJKERK F. Wideband multilayer mirrors with minimal layer thicknesses variation[J]. Optics Express, 2015, 23(7): 9276-83.
[2] WONISCH A, WESTERWALBESLOH T, HACHMANN W, et al. Aperiodic nanometer multilayer systems as optical key components for attosecond electron spectroscopy[J]. Thin Solid Films, 2004, s464-465(1): 473-477.
[3] CHEN Hong, LAN Hui, CHEN Zi-qi, et al. Experimental study on laser produced tin droplet plasma extreme ultraviolet light source[J]. Acta Physica Sinica, 2015, 64(7): 75202-075202.
[4] HUANG Q, MEDVEDEV V, ROBBERT V D K, et al. Spectral tailoring of nanoscale EUV and soft x-ray multilayer optics[J]. Applied Physics Reviews, 2017, 4(1): 011104.
[5] SZENTGYORGYI A, CHRISTENSEN F E, ROLL J, et al. Design of grazing-incidence multilayer supermirrors for hard-x-rayreflectors[J]. Applied Optics, 1995, 34(34): 7935-44.
[6] KOZHEVNIKOV I V, BUKREEVA I N, ZIEGLER E. Design of X-ray supermirrors[J]. Nuclear Inst and Methods in Physics Research A, 2001, 460(2): 424-443.
[7] ZHAO Yong-peng, XU Qiang, XIAO De-long, et al. Time behavior and optimum conditions for the Xe gas extreme ultraviolet source[J]. Acta Physica Sinica, 2013, 62(24): 1706-1721.
[8] AQUILA A L, SALMASSI F, DOLLAR F, et al. Developments in realistic design for aperiodic Mo/Si multilayer mirrors.[J]. Optics Express, 2006, 14(21): 10073-10078.
[9] YAKSHIN A E, KOZHEVNIKOV I V, ZOETHOUT E, et al. Properties of broadband depth-graded multilayer mirrors for EUV optical systems[J]. Optics Express, 2010, 18(7): 6957-71.
[10] CHEN Zhao-quan, LIU Ming-hai, LIU Yu-ping, et al. Fabrication of transparent conductive AZO (ZnO: Al) film by plasma enhanced chemical vapor deposition[J]. Acta Physica Sinica, 2009, 58(6): 4260-4266.
[11] CHEN Ming, ZHOU Xi-ying, MAO Xiu-juan, et al. Inuence of external magnetic eld on properties of aluminum-doped zinc oxide lms prepared by RF magnetron sputtering[J]. Acta Physica Sinica, 2014, 63(9): 98103-098103.
[12] CHEN Chao, JI Yong, GAO Xiao-yong, et al. Study on the deposition of aluminum-doped zinc oxide films using direct-current pulse magnetron reactive sputtering technique[J]. Acta Physica Sinica, 2012, 61(3): 036104.
[13] HAN Jun, ZHANG Peng, GONG Hai-bo. Influence of the growth conditions on the transparent conductive properties of Zn O: Al thin films grown by pulsed laser deposition[J]. Acta Physica Sinica,2013, 62(21): 216102.
[14] LIANG Shuang, HUANG Zeng-xia, DU Xiao-long. Modulation of electrical and optical properties of gallium-doped ZnO films by radio frequency magnetron sputtering[J]. Chinese Physics B, 2012, 21(6): 478-484.
[17] HAUPT R L, HAUPT S E. The binary genetic algorithm[M]. Practical Genetic Algorithms, Second Edition. John Wiley & Sons, Inc. 2004.
[18] ZHANG Chao, ZHANG Jie-rui, WANG Yi-ming, et al. Design of broad-angle extreme ultraviolet multilayer coatings based on quantum evolutionary algorithm[J]. Acta Optica Sinica, 2017, 37(6): 0631001.
[20] LI P, LI S. Quantum-inspired evolutionary algorithm for continuous space optimization based on Bloch coordinates of qubits[J]. Neurocomputing, 2008, 72(1-3): 581-591.
[22] HAN K H, KIM J H. Quantum-inspired evolutionary algorithm for a class of combinatorial optimization[J]. IEEE Transactions on Evolutionary Computation, 2002, 6(6): 580-593.
[23] DAI H, YANG Y, LI C, et al. Quantum interference crossover-based clonal selection algorithm and its application to traveling salesman problem[J]. Ieice Transactions on Information And Systems, 2009, 92(1): 78-85.
[24] HENKE B L, GULLIKSON E M, DAVIS J C. X-ray interactions : photoabsorption , scattering , transmission , and reflection at E=50-30, 000 eV , Z=1-92[J] . Atomic Data and Nuclear Data Tables , 1993 , 54 (4): 181 - 342.
[25] HAN K H, KIM J H. Genetic quantum algorithm and its application to combinatorial optimization problem[J]. Institute of Electrical and Electronics Engineers , 2000, 2: 1354-1360.
[26] WANG X, WANG X D, KUI L U. Optical thin film optimization design using adaptive real-coded genetic algorithm[J]. Chinese Journal of Quantum Electronics, 2004, 21(1): 51-55.