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    Journals >Optics and Precision Engineering >Volume 15 >Issue 7 >Page 1084 > Article
    • Optics and Precision Engineering
    • Vol. 15, Issue 7, 1084 (2007)
    Theory and experiment on hydrodynamic suspension ultra-smooth machining for silicon wafers
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    [in Chinese], [in Chinese], [in Chinese], [in Chinese]. Theory and experiment on hydrodynamic suspension ultra-smooth machining for silicon wafers[J]. Optics and Precision Engineering, 2007, 15(7): 1084 Copy Citation Text show less

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    [in Chinese], [in Chinese], [in Chinese], [in Chinese]. Theory and experiment on hydrodynamic suspension ultra-smooth machining for silicon wafers[J]. Optics and Precision Engineering, 2007, 15(7): 1084
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