[2] FERRARI A C. Diamond-like carbon for magnetic storage disks［J］. Surf Coat Technol, 2004, 180: 190-194.
[3] LI D J, GURUZ M U, BHATIA C S, et al. Ultrathin CNx overcoats for 1 Tb/in.2 hard disk drive system［J］. Appl Phys Lett, 2002, 81: 1113-1117.
[4] CHOLERIDIS A, SAO-JOAO S, BEN-MOHAMED J, et al. Experimental study of wear-induced delamination for DLC coated antomotive components［J］. Surf Coat Technol, 2018, 352: 549-560.
[5] DING J C, DAI W, ZHENG T F, et al. Microstructure and properties of Nb-doped diamond-like carbon flms deposited by high power impulse magnetron sputtering［J］. Thin Solid Films, 2018, 663: 159-167.
[6] SHEEJA D, TAY B K, LAU S P, et al. Tribological properties and adhesive strength of DLC coatings prepared under different substrate bias voltages［J］. Wear, 2001, 249: 433-439.
[7] BAN M, HASEGAWA T. Internal stress reduction by incorporation of silicon in diamond-like carbon films［J］. Surf Coat Technol, 2003, 162: 1-9.
[8] WANG A Y, LEE K R, AHN J P, et al. Structure and mechanical properties of W incorporated diamond-like carbon films prepared by a hybrid ion beam deposition technique［J］. Carbon, 2006, 44: 1826.
[9] ZHANG W, TANAKA A, WAZUMI K, et al. The effect of annealing on mechanical and tribological properties of diamond-like carbon multilayer films［J］. Diamond Relat Mater, 2004, 13: 2166.
[10] XU S P, LI X W, HUANG M D, et al. Stress reduction dependent on incident angles of carbon ions in ultrathin tetrahedral amorphous carbon films［J］. Appl Phys Lett, 2014, 104: 141908.
[14] OWENS K, WENDT R C. Estimation of the surface free energy of polymers［J］. J Appl Polym Sci, 1969, 13: 1741.
[18] SUN L L, GUO P, KE P L, et al. Synergistic effect of Cu/Cr co-doping on the wettability and mechanical properties of diamond-like carbon films［J］. Diam Relat Mater, 2016, 68: 1-9.
[19] DING J C, MEI H J, ZHENG J, et al. Microstructure and wettability of novel Al-containing diamond-like carbon films deposited by a hybrid sputtering system［J］. J Alloys Compd, 2021, 868: 159130.
[20] CASIRAGHI C, FERRARI A C, OHR R, et al. Dynamic roughening of tetrahedral amorphous carbon［J］. Phys Rev Lett, 2003, 91: 226-231.
[21] ZHONG M, ZHANG C H, LUO J B. Effect of substrate morphology on the roughness evolution of ultra thin DLC films［J］. Appl Surf Sci, 2008, 254: 6742-6747.
[22] MA T B, HU Y Z. Effect of impact angle and substrate roughness on growth of diamond-like carbon films［J］. J Appl Phys, 2007, 101: 014901.
[23] BHATTACHARYYA S, LUBBE M, BRESSLER P R, et al. Structure of nitrogenated amorphous carbon films from NEXAFS［J］. Diam Relat Mater, 2002, 11: 8-14.
[24] ROY S S, MCCANN R, PAPAKONSTANTINOU P, et al. Near edge X-ray absorption fine structure study of aligned bonded carbon structures in nitrogenated ta-C films［J］. J Appl Phys, 2006, 99: 043511
