A multi scan mode Atomic Force Microscope (AFM) with improved properties and high applicability is proposed. The AFM system consists of three different scanners and provides at least three scan modes. The first scanner made of tube piezos and flexure structures uses the sample scan mode to realize high speed and high resolution imaging for small sized sample. The second scanner made of stack piezos takes the tip scan mode for small and/or large samples. The third scanner driven by step motors provides the sample scan mode to realize wide range imaging for large sized samples. Their scan ranges can reach 4 μm×4 μm, 20 μm×20 μm and 40 μm×40 μm, respectively. Experiments show that, with multi scan modes and special structures, the AFM is of improved properties such as high resolution, quick scan speed, and high repeatability. Meanwhile, it is capable of realizing micro/nano imaging with different scan range for small and/or large sized samples. With these improved properties and high applicability, the AFM can be widely applied in the fields of micro/nano-technology.