[1] Hairen WANG. Research on a bimorph piezoelectric deformable mirror for adaptive optics in optical telescope. Optics Express, 25, 8115-8122(2017).

[2] Yuanyuan WANG, Yi HE, Ling WEI et al. Bimorph deformable mirror based adaptive optics scanning laser ophthalmoscope for retina imaging in vivo. Chinese Optics Letters, 15, 121102(2017).

[3] Guohui LI, Honglai XU, Jing WU et al. Active correction of intracavity aberration combination in unstable resonator thin-disk laser. Chinese Journal of Lasers, 47, 30-37(2020).

[4] Licheng SUN, Yamin ZHENG, Chuang SUN et al. Simulational and experimental investigation on the actuator-corresponding high-frequency aberration of the piezoelectric stacked array deformable mirror. Optics Express, 26, 23613-23628(2018).

[5] Kai CHEN, Junjie CHEN, Yuxin MAO et al. Simulation and experiment of 214-element unimorph deformable mirror with edge-driven. Acta Photonica Sinica, 45, 0822004(2016).

[6] K L WLODARCZYK, E BRYCE, N SCHWARTZ et al. Scalable stacked array piezoelectric deformable mirror for astronomy and laser processing applications. Review of Scientific Instruments, 85, 024502(2014).

[7] Jianqiang MA, Ying LIU, Ting HE et al. Double drive modes unimorph deformable mirror for low-cost adaptive optics. Applied Optics, 50, 5647-5654(2011).

[8] Tairan PENG, Wenlai LI, Junqiang LOU et al. Development of a bimorph deformable mirror driven by positive-voltage actuators at edge. Acta Photonica Sinica, 48, 0822003(2019).

[9] V TOPOROVSKIY, A V TOPOROVSKIY, V SAMARKIN et al. Bimorph deformable mirror with a high density of electrodes to correct for atmospheric distortions. Applied Optics, 58, 6019-6026(2019).

[10] T WEYRAUCH, M A VORONTSOV, T G BIFANO et al. Performance evaluation of micromachined mirror arrays for adaptive optics, 4124, 41241(2000).

[11] M A EALEY, J T TRAUGER. High-density deformable mirrors to enable coronographic planet detection, 5166, 172-179(2004).

[12] Chunlin GUAN, Xiaojun ZHANG, Jianming DENG et al. Deformable mirror technologies at Institute of Optics and Electronics, Chinese Academy of Sciences. Opto-Electronic Engineering, 47, 200337(2020).

[13] G VDOVIN, M LOKTEV, A SIMONOV. Low-cost deformable mirrors: technologies and goals, 5894, 58940B(2005).

[14] E H YANG, Y HISHINUMA, Jiangong CHENG et al. Thin-film piezoelectric unimorph actuator-based deformable mirror with a transferred silicon membrane. Journal of Microelectromechanical Systems, 15, 1214-1225(2006).

[15] Jianqiang MA, Ying LIU, Caipeng CHEN et al. Deformable mirrors based on piezoelectric unimorph microactuator array for adaptive optics correction. Optics Communications, 284, 5062-5066(2011).

[16] Lei TIAN, Zhengxiong ZHU, Jialian ZHANG et al. Design and fabrication of deformable mirror driven by piezoelectric buzzer array, 10255, 102555F(2017).

[17] Xudong LIN, Xinyue LIU, Jianli WANG et al. Developement and performance test of the 961-element deformable mirror. Acta Optica Sinica, 33, 0601001(2013).

[18] J SINQUIN, J LURCON, C GUILLEMARD et al. Deformable mirror technologies for astronomy at CILAS, 7015, 70150O(2008).