Resonant characteristics of microcantilever by using self-mixing interferometer based on phase reconstruction method

Shaoqing Wang; Xiangzhao Wang

doi:10.3788/COL20100802.0177

Journals >Chinese Optics Letters >Volume 8 >Issue 2 >Page 177 > Article

Chinese Optics Letters
Vol. 8, Issue 2, 177 (2010)

Resonant characteristics of microcantilever by using self-mixing interferometer based on phase reconstruction method

Shaoqing Wang^1、2 and Xiangzhao Wang¹

Author Affiliations

¹Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, China

²Graduate University of the Chinese Academy of Sciences, Beijing 100049, China

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DOI: 10.3788/COL20100802.0177 Cite this Article Set citation alerts

Shaoqing Wang, Xiangzhao Wang. Resonant characteristics of microcantilever by using self-mixing interferometer based on phase reconstruction method[J]. Chinese Optics Letters, 2010, 8(2): 177 Copy Citation Text

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Abstract

The self-mixing interferometer is used to investigate the characteristics of resonant frequency of the microresonator, which is excited by a sinusoidally driven loud-speaker. The detected self-mixing signal is processed by the phase reconstruction method. The 1st-order resonant frequency of the microresonator is measured to be 4.437 kHz with full-width at half-maximum (FWHM) of 0.13 kHz. The measurement results are verified by the sinusoidal phase modulating (SPM) interferometer.

Keywords

120.0120 220.4840 230.5750

Shaoqing Wang, Xiangzhao Wang. Resonant characteristics of microcantilever by using self-mixing interferometer based on phase reconstruction method[J]. Chinese Optics Letters, 2010, 8(2): 177

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