[1] Grann E B, Moharam M G. Hybrid two-dimensional subwavelength surface-relief grating-mesh structures.Appl Opt, 1996,35(5):795～800

[6] Motamedi M E, Southwell W H, Gunning W J. Antireflection surfaces in silicon using binary optics technology.Appl Opt, 1992,31(22) : 4371～4376

[7] Noponen E, Turunen J. Eigenmode method for electromagnetic synthesis of diffractive elements with three-dimensional profiles.J Opt Soc Am (A), 1994,11(9) : 2494～2502

[8] Grann E G, Moharam M G, Pommet D A. Artificial uniaxial and biaxial dielectrics with use of two-dimensional subwavelength binary gratings.J Opt Soc Am (A), 1994,11(10):2695～2703