• Chinese Journal of Lasers
  • Vol. 45, Issue 1, 104005 (2018)
Yu Fuli*, Lu Lihua, and Zhang Qingchun
Author Affiliations
  • [in Chinese]
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    DOI: 10.3788/CJL201845.0104005 Cite this Article Set citation alerts
    Yu Fuli, Lu Lihua, Zhang Qingchun. Design of Five Degree of Freedom Parallel Locating Mechanism for Mosaic Gratings[J]. Chinese Journal of Lasers, 2018, 45(1): 104005 Copy Citation Text show less
    Mechanism of mosaic gratings. (a) Adjusting principle of five degrees of freedom of the sub-gratings; (b) design model of grating mosaic device
    Fig. 1. Mechanism of mosaic gratings. (a) Adjusting principle of five degrees of freedom of the sub-gratings; (b) design model of grating mosaic device
    Structural schematic of flexible ball hinge
    Fig. 2. Structural schematic of flexible ball hinge
    Finite element model of grating mosaic mechanism
    Fig. 3. Finite element model of grating mosaic mechanism
    Mode analysis results of grating mosaic mechanism. (a) First order frequency and mode; (b) second order nature frequency and mode
    Fig. 4. Mode analysis results of grating mosaic mechanism. (a) First order frequency and mode; (b) second order nature frequency and mode
    Scheme of light path of grating mosaic experiment
    Fig. 5. Scheme of light path of grating mosaic experiment
    Image of far-field focal spot by experiment. (a) Before coplanar adjustment; (b) after coplanar adjustment
    Fig. 6. Image of far-field focal spot by experiment. (a) Before coplanar adjustment; (b) after coplanar adjustment
    ItemMacro-actuationMicro-actuation
    Δx=500 μmΔz=500 μmΔx=12.5 μmΔz=12.5 μm
    Δx /μm500±0.210.1712.5±0.0050.005
    Δz /μm0.33500±0.180.00812.5±0.005
    Δθx /μrad0.030.0100
    Δθy /μrad-3.330.220.0850
    Δθz /μrad0.01-0.0300
    Table 1. Results of displacement adjustment of mosaic grating by FEM
    Yu Fuli, Lu Lihua, Zhang Qingchun. Design of Five Degree of Freedom Parallel Locating Mechanism for Mosaic Gratings[J]. Chinese Journal of Lasers, 2018, 45(1): 104005
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