Beam Pointing Deviation Correction System Based on Fast Steering Mirrors

Xingfei Ren; Jinwei Fan; Ri Pan; Kun Sun

doi:10.3788/CJL221459

Journals >Chinese Journal of Lasers >Volume 50 >Issue 14 >Page 1405003 > Article

Chinese Journal of Lasers
Vol. 50, Issue 14, 1405003 (2023)

Beam Pointing Deviation Correction System Based on Fast Steering Mirrors

Xingfei Ren, Jinwei Fan^*, Ri Pan, and Kun Sun

Author Affiliations

Institute of CNC Precision Machining Technology, Faculty of Materials and Manufacturing, Beijing University of Technology, Beijing 100124, China

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DOI: 10.3788/CJL221459 Cite this Article Set citation alerts

Xingfei Ren, Jinwei Fan, Ri Pan, Kun Sun. Beam Pointing Deviation Correction System Based on Fast Steering Mirrors[J]. Chinese Journal of Lasers, 2023, 50(14): 1405003 Copy Citation Text

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Fig. 1. Schematic of beam pointing deviation correction system

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Fig. 2. Schematic of principle of detector

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Fig. 3. Experiment diagram

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Fig. 4. Prediction results for incident laser pointing deviations. (a)

δ_{y}

; (b)

δ_{z}

; (c)

ε_{y}

; (d)

ε_{z}

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Fig. 5. Error distributions of control angles calculated using mapping model. (a)

α_{2}

; (b)

γ_{2}

; (c)

α_{3}

; (d)

γ_{3}

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Fig. 6. Position offsets detected by CMOS. (a)

δ_{o x}

; (b)

δ_{o y}

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Fig. 7. Beam focus shift distributions before and after correction. (a)

δ_{o x}

; (b)

δ_{o y}

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Optical element	Laser	Reflector	FSM1	FSM2	BS1	BS2	PSD1	PSD2
$O_{i x}$ /mm	$-$ 100	0	0	200	200	200	200	100
$O_{i y}$ /mm	50	50	0	0	50	100	150	100
$O_{i z}$ /mm	0	0	0	0	0	0	0	0
$n_{i x}$	1	$- 1 / \sqrt[]{2}$	$- 1 / \sqrt[]{2}$	$- 1 / \sqrt[]{2}$	$1 / \sqrt[]{2}$	$- 1 / \sqrt[]{2}$	1	0
$n_{i y}$	0	$- 1 / \sqrt[]{2}$	$1 / \sqrt[]{2}$	$1 / \sqrt[]{2}$	$- 1 / \sqrt[]{2}$	$- 1 / \sqrt[]{2}$	0	$-$ 1
$n_{i z}$	0	0	0	0	0	0	0	0

Table 1. Original attitude of each component

Xingfei Ren, Jinwei Fan, Ri Pan, Kun Sun. Beam Pointing Deviation Correction System Based on Fast Steering Mirrors[J]. Chinese Journal of Lasers, 2023, 50(14): 1405003

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