ZHANG Lu, YUAN Guo-dong, WANG Qi, WANG Ke-chao, WU Ruiwei, LIU Zhi-qiang, LI Jin-min, WANG Jun-xi. Effects of etching conditions on surface morphology of periodic inverted trapezoidal patterned Si(100) substrate[J]. Optoelectronics Letters, 2017, 13(1): 45

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- Optoelectronics Letters
- Vol. 13, Issue 1, 45 (2017)
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