[1] WANG Y ZH, YU H, YI J, et al.. Grating eccentricity monitoring system for image-based angular displacement measurement ［J］.Opt. Precision Eng., 2020, 28(5): 1038-1045. (in Chinese)

     WANG Y ZH, YU H, YI J, et al.. Grating eccentricity monitoring system for image-based angular displacement measurement ［J］.Opt. Precision Eng., 2020, 28(5): 1038-1045. (in Chinese)

[2] HAN Q Y, CHEN Y, ZHANG H SH, et al.. Development of high-temperature resistant incremental encoder［J］. Opt. Precision Eng., 2019, 27(7): 1458-1464.(in Chinese)

     HAN Q Y, CHEN Y, ZHANG H SH, et al.. Development of high-temperature resistant incremental encoder［J］. Opt. Precision Eng., 2019, 27(7): 1458-1464.(in Chinese)

[3] YU L D, BAO W H, ZHAO H N, et al.. Application and novel angle measurement error compensation method of circular gratings［J］. Opt. Precision Eng., 2019, 27(8): 1719-1726.(in Chinese)

     YU L D, BAO W H, ZHAO H N, et al.. Application and novel angle measurement error compensation method of circular gratings［J］. Opt. Precision Eng., 2019, 27(8): 1719-1726.(in Chinese)

[4] LOU ZH F, HAO X P, LIU L, et al.. Spindle radial motion error measurement using a circular grating and a autocollimator［J］. Opt. Precision Eng., 2019, 27(9): 2053-2061.(in Chinese)

     LOU ZH F, HAO X P, LIU L, et al.. Spindle radial motion error measurement using a circular grating and a autocollimator［J］. Opt. Precision Eng., 2019, 27(9): 2053-2061.(in Chinese)

[5] BU Q Q, WANG D, QIU Y, et al.. MEMS based display and LCD technology［J］. Chinese Journal of Liquid Crystals and Displays, 2020, 35(5): 430-436.(in Chinese)

     BU Q Q, WANG D, QIU Y, et al.. MEMS based display and LCD technology［J］. Chinese Journal of Liquid Crystals and Displays, 2020, 35(5): 430-436.(in Chinese)

[6] PENG D L, LI Y, FU M, et al.. Study on parasitic time grating sensors used for mechanical transmission error measurement under harsh and special environment［J］. Chinese Journal of Scientific Instrument, 2013, 34(2): 359-365. (in Chinese)

     PENG D L, LI Y, FU M, et al.. Study on parasitic time grating sensors used for mechanical transmission error measurement under harsh and special environment［J］. Chinese Journal of Scientific Instrument, 2013, 34(2): 359-365. (in Chinese)

[7] PENG D L, FU M , CHEN X H, et al.. Classification study on typical displacement sensors and analysis on the characteristics of time grating sensors［J］. Journal of Mechanical Engineering, 2018, 54(10): 36-42. (in Chinese)

     PENG D L, FU M , CHEN X H, et al.. Classification study on typical displacement sensors and analysis on the characteristics of time grating sensors［J］. Journal of Mechanical Engineering, 2018, 54(10): 36-42. (in Chinese)

[8] WU L, PENG D L, TANG Q F, et al.. Measurement principle and structure optimization of parasitic time grating displacement sensor［J］. Chinese Journal of Scientific Instrument, 2016, 17(5): 976-984. (in Chinese)

     WU L, PENG D L, TANG Q F, et al.. Measurement principle and structure optimization of parasitic time grating displacement sensor［J］. Chinese Journal of Scientific Instrument, 2016, 17(5): 976-984. (in Chinese)

[9] YANG H T, ZHANG L SH, FEI Y T, et al.. Error source analysis and verification of parasitic time grating angular displacement sensor［J］. Journal of Huazhong University of Science of Technology(Natural Science Edition), 2016, 44(6): 40-45. (in Chinese)

     YANG H T, ZHANG L SH, FEI Y T, et al.. Error source analysis and verification of parasitic time grating angular displacement sensor［J］. Journal of Huazhong University of Science of Technology(Natural Science Edition), 2016, 44(6): 40-45. (in Chinese)

[10] LIU X K, PENG K, WANG X Q, et al.. Theoretical model and error analysis of nanometer time grating displacement sensor［J］. Chinese Journal of Scientific Instrument, 2014, 35(5): 1136-1142. (in Chinese)

     LIU X K, PENG K, WANG X Q, et al.. Theoretical model and error analysis of nanometer time grating displacement sensor［J］. Chinese Journal of Scientific Instrument, 2014, 35(5): 1136-1142. (in Chinese)

[11] LIU X K, PU H J, ZHENG F Y, et al.. Research on electric field distribution and error characteristics of the nanometer time grating displacement sensor［J］. Chinese Journal of Scientific Instrument, 2013, 34(10): 2257 -2264. (in Chinese)

     LIU X K, PU H J, ZHENG F Y, et al.. Research on electric field distribution and error characteristics of the nanometer time grating displacement sensor［J］. Chinese Journal of Scientific Instrument, 2013, 34(10): 2257 -2264. (in Chinese)

[12] FAN B, CHEN X H, XIAO CH H, et al.. Research on mathematical and physical model of magnetic displacement sensor error［J］. Chinese Journal of Scientific Instrument, 2016, 17(5): 985 -992. (in Chinese)

     FAN B, CHEN X H, XIAO CH H, et al.. Research on mathematical and physical model of magnetic displacement sensor error［J］. Chinese Journal of Scientific Instrument, 2016, 17(5): 985 -992. (in Chinese)

[13] LU J, CHEN X H, TANG Q F, et al.. Variable coupling time grating sensor and effects of sensor-head attitudes on measuring error ［J］. Opt. Precision Eng., 2016, 24(9): 2271-2282. (in Chinese)

     LU J, CHEN X H, TANG Q F, et al.. Variable coupling time grating sensor and effects of sensor-head attitudes on measuring error ［J］. Opt. Precision Eng., 2016, 24(9): 2271-2282. (in Chinese)

[14] PENG K , LIU X K , CHEN Z R , et al.. Sensing mechanism and error analysis of a capacitive long-range displacement nanometer sensor based on time grating［J］. IEEE SENS J, 2017, 17(6): 1596-1607.

     PENG K , LIU X K , CHEN Z R , et al.. Sensing mechanism and error analysis of a capacitive long-range displacement nanometer sensor based on time grating［J］. IEEE SENS J, 2017, 17(6): 1596-1607.

[15] YANG H T, ZHANG L SH, ZHOU J, et al.. Effect of installation error of parasiyic time grating on sensor measuring accuracy［J］. Opt. Precision Eng., 2016, 24(2), 319-326. (in Chinese)

     YANG H T, ZHANG L SH, ZHOU J, et al.. Effect of installation error of parasiyic time grating on sensor measuring accuracy［J］. Opt. Precision Eng., 2016, 24(2), 319-326. (in Chinese)

[16] SUN SH ZH, PENG D L, FU M , et al.. Probe design method for improving the precision of embedded time grating sensor［J］. Chinese Journal of Scientific Instrument, 2015, 36(1): 26-31. (in Chinese)

     SUN SH ZH, PENG D L, FU M , et al.. Probe design method for improving the precision of embedded time grating sensor［J］. Chinese Journal of Scientific Instrument, 2015, 36(1): 26-31. (in Chinese)