Huan-lin LÜ, Yu-xin LIANG, Xiu-you HAN, Zhen-lin WU, Yi-ying GU, Ming-shan ZHAO. Simulation and Fabrication of Polymeric Slot Waveguide for Refractive Index Sensing[J]. Acta Photonica Sinica, 2020, 49(2): 0213001
- Acta Photonica Sinica
- Vol. 49, Issue 2, 0213001 (2020)
Fig. 1. 基于狭缝波导的微环谐振器俯视图Top view of the microring resonator based on slot waveguide
Fig. 2. 聚合物狭缝波导结构横截面Schematic view of polymer slot waveguide cross-section
Fig. 3. TE0与TE1模式的有效折射率随狭缝波导宽度W 的变化关系The dependence of the effective refractive index of TE0 and TE1 on the slot waveguide width
Fig. 4. 传感灵敏度与波导高度、宽度及狭缝宽度的关系The relationships between the sensitivity and the waveguide height, widths and gap widths
Fig. 5. 波导有效折射率随上包层折射率的变化Effective index of waveguide versus index of upper cladding
Fig. 6. 硅母版模的制备流程Schematic of the fabrication process of silicon master mold
Fig. 7. 硅母版模电镜图The SEM images of the silicon master mold
Fig. 8. 制备流程图Schematic of the fabrication process
Fig. 9. PFPE软模具和Ormocore波导电镜图The SEM images of the PFPE soft mold and Ormocore waveguide
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Table 1. The single mode conditions for different slot widths
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