[1] ZHANG H, HIGUCHI T, NISHIOKI N. Dual tunneling-unit scanning tunneling microscope for length measurement based on crystalline lattice [J]. Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, 1997, 15 (1):174-177.

[2] KUDOH K, GOTOH T, SAITO K,et al.. Development of piezo micromanipulator for cell micromanipulation [J]. Journal of Mammalian Ova Research, 1990, 7(1):7-12.(in Japanese)

[3] http://www.nanotechnik.com/index.html[OL].

[4] LIU J F, YANG SH CH, YANG ZH G,et al.. Study on precision PZT rotary step actuator with inner anchor/loosen [J]. Opt. Precision Eng., 2006, 14(4): 594-601.(in Chinese)

[5] HIGUCHI T, WATANABE M,KUDOH K. Precise positioner utilizing rapid deformations of a piezo electric element [J]. Journal of the Japan Society for Precision Engineering, 1988, 54(11): 2107-2112.(in Japanese)

[6] POZZI M,KING T. Piezoelectric modelling for an impact actuator [J]. Mechatronics, 2003, 13(6): 553-570.

[7] HA J L, FUNG R F, YANG C S. Hysteresis identification and dynamic responses of the impact drive mechanism [J]. Journal of Sound and Vibration, 2005, 283 (3-5): 943-956.

[8] CHEN X P. Research on Drive Theory and Experiments Piezoelectric Inertial Impact Movement Mechanism [D]. Changchun:Jilin University,2003.(in Chinese)

[9] ZHANG H ZH, ZENG P, HUA SH M, et al.. Impact drive rotary precision actuator by piezoelectric bimorphs [J]. Opt. Precision Eng., 2005, 13(3):298-304.(in Chinese)

[10] MORITA T,YOSHIDA R,OKAMOTO Y, et al.. Three DOF parallel link mechanism utilizing smooth impact drive mechanism [J]. Journal of the International Societies for Precision Engineering and Nanotechnology, 2002, 26(3): 289-295.

[11] FURUTANI K, MOHRI N, HIGUCHI T. Self-running type electrical discharge machine by using impact drive mechanism [J]. Journal of the Japan Society for Precision Engineering, 1997, 63(9): 1290-1294.

[12] HIGUCHI T, YAMAGATA Y. Micro robot arm utilizing rapid deformation of piezoelectric elements [J]. Advanced Robotics of Robotics Society of Japan, 1992, (63): 353-360.

[13] ZHAO H W, WU B D, YANG ZH G, et al.. Clamping performance for inchworm-type piezoelectric rotary actuator [J]. Journal of Xi'an Jiaotong University, 2007(9):1022-1025.(in Chinese)

[14] http://www.pi-china.cn/products/ArticleShow.asp ArticleID=149[OL].

[15] http://www.intellect.pe.u-tokyo.ac.jp/research/pidm/pidm_e.html[OL].

[16] JIANG N, LIU J B, TAO T, et al.. Motion characteristics of a rotary piezo impact drive mechanism [J]. SPIE,2007,6423: 642324.1-642324.8.

[17] JIANG N, LIU J B, FANG G R,et al.. Research on impact drive mechanism piezoelectric micro-motor [J]. Piezoelectrics & Acoustooptics, 2007, 29(2): 187-189.(in Chinese)