• Chinese Journal of Lasers
  • Vol. 32, Issue 3, 389 (2005)
[in Chinese]1、*, [in Chinese]1, [in Chinese]1, [in Chinese]1, [in Chinese]1, [in Chinese]2, and [in Chinese]2
Author Affiliations
  • 1[in Chinese]
  • 2[in Chinese]
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    [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese]. Method of Heterodyne Confocal Microscopy Measuring Big Step Height[J]. Chinese Journal of Lasers, 2005, 32(3): 389 Copy Citation Text show less
    References

    [1] D. M. Gale, M. I. Pether, J. C. Dainty. Linnik microscope imaging of integrated circuit structures [J]. Appl. Opt., 1996, 35(1): 131~148

    [2] Mircea V. Dusa, Linard Karklin. Edge detection strategies for sub-0.5-μm reticle metrology [J]. Solid State Technology, 1995, 9:101~108

    [8] Dejiao Lin, Juqun Yan, Zhixia Chao et al.. Phasemeter with externally trigger applied for PZT-modulated interferometer [J]. International J. Electron., 2002, 89(10):759~769

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    [1] Liu Dali, Wang Yun, Qiu Lirong, Zhao Weiqian. Differential Confocal Microscopy for Edge Contour Detection and Location[J]. Chinese Journal of Lasers, 2014, 41(10): 1008001

    [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese]. Method of Heterodyne Confocal Microscopy Measuring Big Step Height[J]. Chinese Journal of Lasers, 2005, 32(3): 389
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