In full-aperture annular polishing, material removal rate increases from the center toward the edge of square optical, which leads to a collapse angle surface profile and affects the precision of the final surface. Several types of element motion trajectories were studied herein, and the material removal rate distribution of a full-aperture surface was calculated based on the Preston equation. Results show that the square optical element moves along the radial direction or in direction of a certain angle with respect to the radial direction while maintaining its original rotation, and the additional speed of individual points on the entire polishing surface remains consistent, making the material removal rate distribution of square optical element more uniform. Therefore, the collapse angle surface profile of the square optical element can be effectively controlled by the additional motion trajectories of elements.