Progress of Excimer Lasers and Its Applications

[in Chinese]

Journals >Chinese Journal of Lasers >Volume 21 >Issue 5 >Page 361 > Article

Chinese Journal of Lasers
Vol. 21, Issue 5, 361 (1994)

Progress of Excimer Lasers and Its Applications

[in Chinese]

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[in Chinese]

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[in Chinese]. Progress of Excimer Lasers and Its Applications[J]. Chinese Journal of Lasers, 1994, 21(5): 361 Copy Citation Text

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Abstract

In this paper, the recent progress of high pulse energy, high pulse power and average power excimer lasers are presented, their applications in scientific research, industry and medicine are also discussed.

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[in Chinese]. Progress of Excimer Lasers and Its Applications[J]. Chinese Journal of Lasers, 1994, 21(5): 361

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