The paper describes VO x thin films deposited on substrates of quartz glass and Si (100) by reactive ion-beam sputtering followed by post annealing, and fabrication of 8-element VO x linear uncooled microbolometer array. SEM and XRD indicate that the films are smooth compact surface morphology with needle like grain and poly-crystal structure of mixed vanadium oxides, and the characterization of the detectors shows that the detectors realize uncooled infrared detection in the spectrum region of 8～12 μm as well.