Xiaohui DU, Fanhong CHEN, Shuai LIU, Minjie ZHU, Jiahao XU. Low stress laser welding technology for corrugated diaphragm of pressure sensor[J]. Optics and Precision Engineering, 2023, 31(11): 1652
- Optics and Precision Engineering
- Vol. 31, Issue 11, 1652 (2023)
Fig. 1. Laser welding process for corrugated diaphragm of pressure sensor
Fig. 2. Photo of welding spot with laser power of 300 W， pulse frequency of 100 Hz， and pulse width of 1 ms
Fig. 3. Schematic diagram of weld residual stress detection point and collimator working angles
Fig. 4. Photos of weld spot overlap after orthogonal test according to Tab.4
Fig. 5. Sectional view of weld seam with welding power of 350 W， pulse frequency of 150 Hz， pulse width of 1.5 ms， and turntable speed of 4 200 （°）/min
Fig. 6. Tensile loading curve of welding strength tensile test with welding power of 350 W， pulse frequency of 150 Hz， pulse width of 1.5 ms and turntable speed of 4 200 （°）/min
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Table 1. Orthogonal experimental factors for laser welding of corrugated diaphragm
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Table 2. Level value setting of orthogonal test factors in larger range
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Table 3. Orthogonal test level values after adjusting power， pulse frequency and pulse width
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Table 4. Orthogonal test table designed according to factors in Tab.3
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Table 5. Statistics of residual stress data after performing orthogonal test according to Tab.4
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Table 6. Range results calculated by orthogonal test based on data in Tab.4 and Tab.5
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Table 7. Calculation results of static performance parameters of sensors before and after welding corrugated diaphragm
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