YbF3 films were prepared under three different vapor incidence angles with special technics. Micro- surface roughness and transmissivity of the film were measured by Atom Force Microscopy (AFM) and infrared spectrophotometer, respectively. Its refractive index was calculated using envelope method and the stacking density was evaluated according to the calculated refractive index. The experimental results indicate that surface roughtness of the film deteriorates with the increment of the vapor incidence angle, while the refractive index and the stacking density decreases with the increment of the vapor incidence angle.