[2] Vivek Bakshi, Rainer Lebert, Bernhard Jagle et al.. Status report on EUV source development and EVU source applications in EVUL[C].SPIE, 2007, 6533(15): 1～11

[3] Takaharu Mitura, Katsuhiko Murakami, Kazuaki Suzuki et al.. Nikon EUVL development progress update[C]. SPIE, 2007, 6517(7): 1～10

[4] J. J. Rocca. Table-top soft X-ray lasers[J]. Review of Scientific Instruments, 1999, 70(10): 3799～3827