• Chinese Optics Letters
  • Vol. 10, Issue 6, 061202 (2012)
Fan Wang, Hailiang Lu, Qingyun Zhang, and Anatoly Burov
DOI: 10.3788/col201210.061202 Cite this Article Set citation alerts
Fan Wang, Hailiang Lu, Qingyun Zhang, Anatoly Burov. Novel technique for characterizing feature profiles in photolithography process[J]. Chinese Optics Letters, 2012, 10(6): 061202 Copy Citation Text show less
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Data from CrossRef

[1] Dongliang Lin, Fang Zhang, Weilin Cheng, Huijie Huang. Arbitrary trapezoidal illumination generation method based on variable slits for optical lithography. Applied Optics, 57, 2827(2018).

[2] Jingsong Wei, Rui Wang. Maskless direct laser writing with visible light: Breaking through the optical resolving limit with cooperative manipulations of nonlinear reverse saturation absorption and thermal diffusion. Journal of Applied Physics, 115, 123102(2014).

Fan Wang, Hailiang Lu, Qingyun Zhang, Anatoly Burov. Novel technique for characterizing feature profiles in photolithography process[J]. Chinese Optics Letters, 2012, 10(6): 061202
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