Zhifeng LOU, Hanping ZHANG, Jingjie ZHOU, Jiyun ZHANG, Jun QIAN, Guangchao FAN. Real-time spatial error measurement of two-dimensional linear module[J]. Optics and Precision Engineering, 2023, 31(21): 3111
- Optics and Precision Engineering
- Vol. 31, Issue 21, 3111 (2023)
Fig. 1. Installation diagram of single-axis measuring system
Fig. 2. Measuring principle for four-degrees-of freedom
Fig. 3. Measuring principle for roll error
Fig. 4. Two-dimensional linear module assembly
Fig. 5. Setting of two-dimensional linear module and low-order volume coordinate system
Fig. 6. Error conversion diagram based on abbe-bryan principle
Fig. 7. Error calibration of plane mirror system
Fig. 8. Comparison of X axial positioning error
Fig. 9. Comparison of Z axial positioning error
Fig. 10. Devices for comparison of X axial straightness error
Fig. 11. Comparison results of X axial straightness error
Fig. 12. Devices for comparison of Z axial straightness error
Fig. 13. Comparison results of Z axial straightness error
Fig. 14. Device for comparison of X axial angular errors
Fig. 15. Comparison results of X axial angular errors
Fig. 16. Device for comparison of Z axial angular errors
Fig. 17. Comparison results of Z axial angular errors
Fig. 18. Comparison of X axial roll error
Fig. 19. Comparison of Z axial roll error
Fig. 20. Schematic diagram of XZ plane diagonal position measurement
Fig. 21. Measuring devices of XZ plane diagonal position
Fig. 22. Comparison of diagonal position measurement error of XZ plane
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Table 1. Error expression of two-dimensional linear module
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