By using a tuning Q NdYAG laser with an output laser wavelength of 1064 nm, this article focuses on the systematic research on surface damage situation in optical glass caused by impurities in different irradiation ways. On the basis of a determined zero probability in damage threshold within K9 glass and fused silica component substrate, this article proposes experiments on damage characteristics in metal particle pollutants and organic pollutants, analyzes the inducing mechanism of decreased damage threshold caused by surface pollutants.