[1] PELTA E. Two-axis Sawyer motor for motion systems［J］. IEEE Control Systems Magazine, 1987, 7(5): 20-24.

[2] SOLTZ M A, YAO Y L, ISH-SHALOM J. Investigation of a 2-D planar motor based machine tool motion system［J］. Int. J. of Machine Tools & Manufacture, 1999, 39(7): 1157-1169.

[3] ZHANG G, LIU P K, ZHANG B, et al.. Design of trajectory tracking controller for precision position table driven linear motor［J］. Opt. Precision Eng., 2013, 21(2):371-379. (in Chinese)

[4] WANG H Y, FAN K C, YE J K, et al.. A long-stroke nanopositioning control system of the coplanar stage ［J］. IEEE/ASME Transactions on Mechatronics, 2014, 19(1): 348-356.

[5] SHEN J C, LU Q Z, WU C H, et al.. Sliding-mode tracking control with DNLRX model-based friction compensation for the precision stage［J］. IEEE/ASME Transactions on Mechatronics, 2014, 19(2): 788-797.

[6] GAO W, TANO M, KIYNO S, et al.. Precision positioning of a Sawyer motor-driven stage ［J］. J. of Japan Society for Precision Engineering, 2005, 71(4): 523-527.

[7] TANO M, GAO W, DIAN S, et al.. Construction of a measurement and control system for a Sawyer motor-driven planar motion stage ［J］. Nanotechnology and Precision Engineering, 2006, 4(3): 182-189.

[8] KRISHINAMURTHY P, KHORRAMI F. Robust adaptive control of Sawyer motors without current measurements ［J］. IEEE/ASME Transactions on Mechatronics, 2004, 9(4): 689-696.

[9] DIAN S, ARAI Y, GAO W. Precision positioning control of a Sawyer motor-based two-axis planar motion stage ［C］. Proc. 3rd International Conference on Positioning Technology, Shizuoka, 2008: 143-149.

[10] GAO W, DIAN S. Precision Control of Planar Motion Stages-Design and Implementation of Precision Motion Control Strategies［M］. Berlin: Verlag, 2010.

[11] YANG S M, KUO E L. Damping a hybrid stepping motor with estimated position and velocity ［J］. IEEE Transactions on Power Electronics, 2003, 18(3): 880-887.

[12] BENDJEDIA M, AIT-AMIRAT Y, WALTHER B, et al.. Sensorless control of hybrid stepper motor ［C］. 2007 European Conference on Power Electronics and Applications, Alborg, 2007: 1-10.

[13] HIRAI J, KIM T W, KAWAMURA A. Position-sensorless drive of linear pulse motor for suppressing transient vibration ［J］. IEEE Transactions on Industrial Electronics, 2000, 47(2): 337-345.

[14] DIAN S, ARAI Y, GAO W. Precision positioning control of a Sawyer motor-based two-axis planar motion stage ［J］. Int. J. Surface Science and Engineering, 2009, 3(2): 253-271.

[15] SHTESSEL Y, EDWARDS C, FRIDMAN L, et al.. Sliding Mode Control and Observation ［M］. New York: Springer, 2014.