[1] ZHAO CH S. Ultrasonic Motors Technologies and Applications [M]. Beijing:Science Press,2007:369-370.(in Chinese)

[2] SNITKA V. Ultrasonic actuators for nanometer positioning [J]. Ultrasonics, 2000,38:20-25.

[3] CHU X C, XING Z, Li L, et al.. High resolution miniaturized stepper ultrasonic motor using differential composite motion [J]. Ultrasonics, 2004,41:737-741.

[4] WEN J M, CHEN G M, ZENG P, et al.. Inertial piezoelectric rotary actuator based on changing positive pressure [J]. Opt. Precision Eng., 2008,16(1):82-86. (in Chinese)

[5] FAN W, YU X F, XI L. Research on driving system and controlling means of PZT [J]. Opt. Precision Eng., 2007,15(3):368-371. (in Chinese)

[6] LI L, LIU X D, WANG W, et al.. Generalized nonlinear Preisach model for hysteresis nonlinearity of piezoceramic actuator and its numerical implementation [J]. Opt.Precision Eng., 2007,15(5):706-712. (in Chinese)

[7] JIN J M,ZHAO CH S. A vibrators alternation stepping ultrasonic motor[J]. Ultrasonics, 2006,44:565-568.

[8] JIN J M,ZHAO CH S. Linear stepping ultrasonic motor[J]. Journal of Electroceramics, 2008, 20:193-196.

[9] JIN J M, ZHAO CH S. Bi-Mode Alternation Stepping Ultrasonic Motors[J].Journal of Nanjing University of Aeronautics & Astronautics, 2006,38(5):600-604.(in Chinese)

[10] KUSAKABE C, TOMIKAWA Y, TAKANO T, et al.. An encoder-less ultrasonic stepping motor using open-loop control system [C]. Proceedings of 12th Symposium on Ultrasonic Electronics. Tokyo: Japanese Journal of Applied Physics, Supplement, 1992,31(1): 239-241.

[11] MIYAZAWA O. Drive control unit for an ultrasonic step motor. U.S. Patent: 5229678. 1993.

[12] CHEN X, KUSAKABE C, TOMIKAWA Y, et al.. Rotor displacement of the ultrasonic motor having an angular displacement self-correction function [J]. Japanese Journal of Applied Physics, 1993, 32(1): 4198-4201