• Infrared and Laser Engineering
  • Vol. 48, Issue 3, 306003 (2019)
Wu Tianhao1、2、*, Ke Changjun1, Jiang Yongheng3, Kong Xinyi1、2, and Zhong Yanhong1
Author Affiliations
  • 1[in Chinese]
  • 2[in Chinese]
  • 3[in Chinese]
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    DOI: 10.3788/irla201948.0306003 Cite this Article
    Wu Tianhao, Ke Changjun, Jiang Yongheng, Kong Xinyi, Zhong Yanhong. Preparation of high quality trapezoid PMMA micro-channels by CO2 laser multi-path translational method[J]. Infrared and Laser Engineering, 2019, 48(3): 306003 Copy Citation Text show less

    Abstract

    As non-metallic materials have strong absorption of long-wave infrared laser, the CO2 laser is often used to prepare PMMA micro-channels. Due to the Gaussian distribution of the laser light intensity, the cross-section of the micro-channels prepared by the conventional method is triangular. This can′t meet the practical application requirements in the microfluidic chip. In this paper, a CO2 laser multi-path translational method was proposed, which used the HAZ formed by the first etching as a boundary multi-pass lateral overlap translation etching, so that high quality micro-channels with ideal trapezoid cross section can be quickly prepared. In addition, the micro-channel fabricated in this way is smoother and more practical compared with the static multi-pass method in cross-section, HAZ, surface roughness.
    Wu Tianhao, Ke Changjun, Jiang Yongheng, Kong Xinyi, Zhong Yanhong. Preparation of high quality trapezoid PMMA micro-channels by CO2 laser multi-path translational method[J]. Infrared and Laser Engineering, 2019, 48(3): 306003
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